Sharp silicon "nanoedge" with steep slope angles

Layout:

• 88 cells on 1 x 1 mm area
  on 6 x 6 silicon chip

Specification:

• edge recesed against top surface
• useable edge lenght: < 2 microns
• top edge radius: < 10nm
• edge width variation: 3nm (3 sigma)
• upper slope angle: 8°

Special layout makes it easy, to return with a tip always to the identical characterizer position. Many identical sites on a single characterizer chip help to increase lifetime.