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Smart microsystems
Heated and Interdigitated Microdevices
The new SM127 is a microgap electrode with a new twist: the temperature of the microelectrodes can be controlled.

The device consists of a 50 m gap between a pair of co-planar electrodes surrounded by a resistive micro-heater. The micro-electrodes lie on top of a silicon micro-machined membrane with a thickness of between 2 and 10 m. This provides thermal insulation and allows the electrodes to be heated to about 200oC.

Interdigitated Electrodes with the SM94

In response to our customers' requests, we can now present the first interdigitated electrodes in our range of devices. This electrode arrangement still allows for small interelectrode gaps, but with lower resistance than single microbands. As with the SM127, temperature contol is provided using an in-built microheater.