Windsor Scientific | Force standards | Force Standards (Series FC)

Force standards

Force Standards (Series FC)

Front view Series F CD:
One side fastened bending beam (Cantilever) in <100>-direction
• Dimensions of the chip:
length x width: 15 mm x 15 mm
thickness: 0.525 mm

• Main structures:
Cantilever (1),
Marks of Position E, S, P₁, P₂
Guiding grooves (2)

Specification (typical values) of the force standards of series FCD

Parameter	Symbol	Unit	Type FCD
Name			FCD 1000	FCD 130	FCD 50	FCD 15
Stiffness Nominal Real (typical) Uncertainty	k_n k_E ±	N/m mN/µm mN/µm	1000 0.938 0.005	130 0.1225 0.0004	50 0.05450 0.00025	15 0.01276 0.00006
Limits Zero force bending (typical) Maximum bending Maximum force	\|z₀\| z_max F_max	µm µm mN	< 2 100 100	< 2 100 13	< 2 100 5	< 2 100 1.5
Distances Start - End Scan length Guiding grooves	l_SE l_S a	µm µm µm	6347 9640 184	6580 9653 395	6606 9580 441	6633 9615 496
Thickness of the beam Nominal Real (typical) Standard deviation	h_n h ±	µm µm µm	200 195 0.3	100 95 0.3	70 71 0.3	45 43 0.3
Free length of the cantilever	L	µm	5655	5968	5974	6028
Real width of the Cantilever Front Back	b₀ b_u	µm µm	733 741	943 947	991 993	1047 1048
Roughness at front side	R_a(F)	nm	< 5	< 5	< 5	< 5
Roughness at back side	R_a(B)	nm	< 35	< 35	< 35	< 35
Pt at back side (zero load)	Pt (B)	µm	< 2	< 2	< 2	< 2

Legend:

Stiffness (spring constant): under load at the front of the endmark
Maximum force, max. bending: limit of linearity (deflection < 2% of the length of the cantilever)
Free length of the cantilever: distance: fixed end of the thin cantilever – front of the endmarks
R_a(F): arithmetic average roughness of the polished surface (1000 µm scan length)
R_a(B): arithmetic average roughness of the etched back side (1000 µm scan length)
Pt (B): maximum peak to valley distance of the etched back side

Order Codes

Cantilever Shape
Nominal Stiffness k_n (N/m)	Flat parallel (or perpendicular) <110>, Mounted on Glass Substrate	Flat parallel (or perpendicular) <110>, Mounted on Silicon Substrate	Diagonal to the flat <100>, Mounted on Glass Substrate	Diagonal to the flat <100>, Mounted on Silicon Substrate
15	FCF 15 G	FCF 15 S	FCD 15 G	FCD 15 S
50	FCF 50 G	FCF 50 S	FCD 50 G	FCD 50 S
130	FCF 130 G	FCF 130 S	FCD 130 G	FCD 130 S
1000	FCF 1000 G	FCF 1000 S	FCD 1000 G	FCD 1000 S

Bridge Shape
Nominal Stiffness k_n (N/m)	Flat parallel (or perpendicular) <110>, Mounted on Glass Substrate	Flat parallel (or perpendicular) <110>, Mounted on Silicon Substrate	Diagonal to the flat <100>, Mounted on Glass Substrate	Diagonal to the flat <100>, Mounted on Silicon Substrate
15	FBF 15 G*	FBF 15 S*	FBD 15 G*	FBD 15 S*
50	FBF 50 G*	FBF 50 S*	FBD 50 G*	FBD 50 S*
130	FBF 130 G*	FBF 130 S*	FBD 130 G*	FBD 130 S*
1000	FBF 1000 G*	FBF 1000 S*	FBD 1000 G*	FBD 1000 S*

* Bridge Shape Force Standards will be available starting 2003

Order: